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    4Q-BSE Detector

    ID : #9374764
    Scan size : 16,384 x 16,384 pixels max.
    Shipping weight : typ. 7.5 kg
    Video processor weight : 1.1 kg
    PC/Laptop : Intel Core i3, 2x USB 2.0 minimum

    Product Specifications

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    Point Electronic GmbH: 4-quadrant detector with integrated preamplifier

    • 10-pin electrical feed-through
    • USB2 controlled video-processor with 4 inputs for the BSE-detector, 3 inputs for SE, CL, …
    • adjustment of brightness and contrast
    • 8 step low-pass filter
    • DISS5 software-module for video-processor control
    • easy adjustment of Topo- and Compo-images in the DISS5 Channel Mixer
    • simultaneous acquisition of the 4 separate BSE-signal
    • optional live SEM Topography function in DISS5

    Measure surface topography with SEM

    • Use conventional segmented BSE signals
    • Get immediate feedback with automated topographic reconstruction
    • Save topographic data in standard surface file formats

    Distinguish between sample composition and surface topography

    • Resolve ambiguities in image interpretation
    • Reach a wider audience with 3D models, visualisation and printing
    • Measure 3D distances, volumes, steps, roughness, texture…

    Monitor FIB milling and GIS deposition

    • Improve yield of TEM and atom probe sample preparation
    • Verify thickness of GIS deposited layers
    • Monitor FIB milling depths and roughness

    Visualise complex surfaces with ease

    • Add texture from SE, EDS or EBSD maps
    • Manipulate automatic colour textures
    • Extract 3D screenshots for high-impact visualisation

    Calibrate and measure height from offline BSE data

    • Calibrate measurements with dedicated calibration sample
    • Measure 3D positions, distances and angles
    • Measure height and texture for visualisation and analysis

    Continue live topography workflow with off-line analysis

    • Import data into full feature analysis software
    • Measure surface roughness and analyse texture
    • Analyse morphology, grain and particle distributions

    Backscattered (BSE) detector

    • Sensor geometry: 4x quadrant diodes (monolithic sensor), or 4x rectangular diodes (hybrid sensor)
    • Sensor min. energy: 1keV for detector grade Si diodes, or 5keV for standard Si diodes
    • Sensor mount: retractable arm, or pole piece mount
    • Sensor height: 1.2 mm
    • Pre-amplifier mount: in situ
    • Pre-amplifier gain: 10^7 V/A fixed
    • Pre-amplifier size: 22 x 18 mm

    Video processor module

    • Hardware interface: USB 2.0
    • BSE signal inputs: 4x max.
    • SE and AUX signal inputs: 3x max.
    • Simmultaneous output signals: 4x max.
    • Mixed BSE output: 1x conventional compo.
    • Gain: 1 … 100x
    • Output offset: 1.25V max
    • Brightness and Contrast control: integrated software control
    • Signal inversion: Yes
    • Low-pass filter: 8-levels

    Topography calibration sample (m2c)

    • GIS deposited calibration structures: 3x multi-level pyramidal, 1x spherical element
    • FIB milled recognition structure: nanomarkers
    • Total area: 80 x 80 μm, or 40 x 40 μm
    • Nanomarker geometry: 800 nm, or 600 nm
    • Pyramidal element geometry: 90 x 90 x 3 µm, or 45 x 45 x 1.8 µm
    • Spherical element geometry: 10 x 10 x 1 µm
    • Reference data: CD/ROM

    SEM topography acquisition module (DISS 5 Topography)

    • Hardware interface: USB 2.0
    • Simultaneous inputs (i.e. SE, BSE): 4x, 12-bit
    • Mapping signals (i.e. EDS): 12x, 12-bit
    • Scanning interface: pre-configured for SEM and analytical add-ons
    • Synchronization interface: pixel, line, frame
    • Scan size: 16,384 x 16,384 pixels max.
    • Pixel dwell time: 200 ns … 6 milliseconds
    • Pixel over-sampling: 32,000x max.
    • Line averaging: 50x max.
    • Frame averaging: 256x max.
    • Synchronization: mains power
    • ROI scan: yes

    PC/Laptop, Display

    • PC/Laptop: Intel Core i3, 2x USB 2.0 minimum
    • Display: 1,280 x 1,024 resolution minimum, 2x displays recommended
    • Operating systems: Windows 10 … Windows XP
    • Network connection: recommended

    Acquisition software (DISS 5 Topography)

    • BSE detector control: complete software integration
    • SEM mag, kV information: automated SEM communication
    • SEM topography reconstruction: live automatic shape-from-shade (m2c)
    • SEM topography display: 3D visualisation, mountain view
    • SEM topography control: live rotation, pan, tilt, zoom, height-rescalling
    • SEM topography texture: solid colour, height-coded colour LUT
    • Image mixing tool: independent colour/channel, independent intensity/channel, topographic and compositional profiles
    • Scan profile templates: live display, region of interest (ROI), slow scan, area mapping, line scan, video recording (AVI)
    • Signal monitor: analogue signals profiles, level meter graphs, gradation graph tool
    • Software API: yes
    • Image caption overlay: yes
    • Default BSE image file formats: 8 and 16-bit multi-page TIFF
    • Default topography file formats: AL3D, SDF
    • Export image file formats: BMP, JPEG, PNG, GIF
    • Export topography file formats: BMP
    • Operating system: Windows 10 … Windows XP
    • Context sensitive help: English, German

    Analysis software (microCal and micro-Shape from m2c)

    • XYZ calibration: one step calibration with dedicated calibration structure
    • Data extraction: point and line profiles
    • 3D measurements: distances, angles
    • Save file formats: BCR, BCRF, AL3D, NMM, ASC
      Export file formats: PLY, TIF, BMP, JPG, PNG, GIF, TXT, DAT
    • Operating system: Windows 10 … Windows XP
    • Context sensitive help: English, German

    Parts and Cables

    • BSE sensor: optional 1x
    • BSE pre-amplifier: optional 1x
    • BSE insertion/retraction mechanism: optional 1x
    • BSE in situ cable: optional 1x
    • BSE vacuum electrical feedthrough: optional 1x
    • BSE ex situ cable: standard 1x
    • Topography calibration sample: standard 1x
    • Video processor module: standard 1x
    • Video processor ground strap: standard 1x
    • SEM mixed control & acquisition cable: standard 1x
    • SEM acquisition module: standard 1x
    • USB cables: standard 2x
    • USB memory stick: standard 1x
    • PC, keyboard, mouse: optional 1x
    • Displays: optional 2x

    Software packages

    • Video Processor USB driver: Video Processor
    • SEM acquisition USB driver: Digital Image Scanning System 5
    • Shape-from-shadow library: m2cMicroShape (m2c)
    • Acquisition software: DISS 5
    • Analysis software: microShape (m2c)
    • Calibration software: microCal (m2c)

    Weight and Dimensions

    • Video processor dimensions: 19 x 10.5 x 5 cm
    • Video processor weight: 1.1 kg
    • DISS5 module dimensions: 23.5 x 8.7 x 29.5 cm
    • DISS5 module weight: 3.4 kg
    • Shipping dimensions: typ. 36 x 32 x 56 cm
    • Shipping weight: typ. 7.5 kg

    Site requirements

    • Power: 2x mains 110/220 VAC single phase 50-60 Hz, on the same earth as the microscope
    • SEM chamber: 1x flange prepared for muti-pin vacuum electrical feedtrough to pre-amplifier
    • SEM earth: 1x ground strap
    • SEM interface: 1x external analogue interface for XY scan control and SEM signals
    • Space: video processor module must be placed in close proximity of the SEM chamber, power supply and DISS5 modules may be placed on the SEM bench

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