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    JEOL 2010

    ID : #9374764
    Scan size : 16,384 x 16,384 pixels max.
    Shipping weight : typ. 7.5 kg
    Video processor weight : 1.1 kg
    PC/Laptop : Intel Core i3, 2x USB 2.0 minimum

     

    PDF Description

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    Category:

    Hardware

    Turnkey add-on system for any SEM

    • Backscattered electron detector
    • Multi-channel video processor
    • Scan generator and image acquisition
    • Live surface topography software

    Multi-segment solid-stage backscattered electron detectors

    • Monolithic or hybrid quadrant sensors for high resolution
    • Optional light blind sensors for high temperature/in situ SEM
    • In situ pre-amplification for minimum noise and maximum speed

    Video processor for simultaneous data acquisition

    • Channel independent brightness and contrast controls
    • Hardware mixed output for simultaneous acquisition with SE, BSE, EBIC, CL, or EDS
    • USB controlled and fully integrated with the acquisition software

    The most powerful and versatile SEM scanning system – DISS5

    • Integrated scan generator and image acquisition
    • Very large image resolution, up to 16k x 16k pixels
    • Very fast scanning speed, down to 200ns dwell time
    • Simultaneous 4x analogue and 12x digital counter inputs

    Software

    Completely integrated control and acquisition

    • Live surface height reconstruction from BSE signals
    • Built-in 3D surface visualisation tool
    • Configurable workflows with integrated SE and BSE scan profiles

    Reconstructed height is purely topographic and quantitative

    • Surface normals are calculated from 4x BSE gradients at each beam position
    • Complete surface topography is assembled from all surface normals
    • Height resolution depends primarily on beam/sample interaction volume

    Live height visualisation tool

    • Pan, rotate, tilt, zoom and scale Z
    • Enhance with shadows and custom colour coding
    • Export to standard binary AL3D and plain text SDF formats

    One step calibration software with dedicated SEM standard – m2c

    • Calibration of scale in all three spatial directions
    • Orthogonality of all axes (shearing)
    • Analysis of nonlinear deviations

    Measure surface topography with SEM

    • Use conventional segmented BSE signals
    • Get immediate feedback with automated topographic reconstruction
    • Save topographic data in standard surface file formats

    Distinguish between sample composition and surface topography

    • Resolve ambiguities in image interpretation
    • Reach a wider audience with 3D models, visualisation and printing
    • Measure 3D distances, volumes, steps, roughness, texture…

    Monitor FIB milling and GIS deposition

    • Improve yield of TEM and atom probe sample preparation
    • Verify thickness of GIS deposited layers
    • Monitor FIB milling depths and roughness

    Visualise complex surfaces with ease

    • Add texture from SE, EDS or EBSD maps
    • Manipulate automatic colour textures
    • Extract 3D screenshots for high-impact visualisation

    Calibrate and measure height from offline BSE data

    • Calibrate measurements with dedicated calibration sample
    • Measure 3D positions, distances and angles
    • Measure height and texture for visualisation and analysis

    Continue live topography workflow with off-line analysis

    • Import data into full feature analysis software
    • Measure surface roughness and analyse texture
    • Analyse morphology, grain and particle distributions

    Backscattered (BSE) detector

    • Sensor geometry: 4x quadrant diodes (monolithic sensor), or 4x rectangular diodes (hybrid sensor)
    • Sensor min. energy: 1keV for detector grade Si diodes, or 5keV for standard Si diodes
    • Sensor mount: retractable arm, or pole piece mount
    • Sensor height: 1.2 mm
    • Pre-amplifier mount: in situ
    • Pre-amplifier gain: 10^7 V/A fixed
    • Pre-amplifier size: 22 x 18 mm

    Video processor module

    • Hardware interface: USB 2.0
    • BSE signal inputs: 4x max.
    • SE and AUX signal inputs: 3x max.
    • Simmultaneous output signals: 4x max.
    • Mixed BSE output: 1x conventional compo.
    • Gain: 1 … 100x
    • Output offset: 1.25V max
    • Brightness and Contrast control: integrated software control
    • Signal inversion: Yes
    • Low-pass filter: 8-levels

    Topography calibration sample (m2c)

    • GIS deposited calibration structures: 3x multi-level pyramidal, 1x spherical element
    • FIB milled recognition structure: nanomarkers
    • Total area: 80 x 80 μm, or 40 x 40 μm
    • Nanomarker geometry: 800 nm, or 600 nm
    • Pyramidal element geometry: 90 x 90 x 3 µm, or 45 x 45 x 1.8 µm
    • Spherical element geometry: 10 x 10 x 1 µm
    • Reference data: CD/ROM

    SEM topography acquisition module (DISS 5 Topography)

    • Hardware interface: USB 2.0
    • Simultaneous inputs (i.e. SE, BSE): 4x, 12-bit
    • Mapping signals (i.e. EDS): 12x, 12-bit
    • Scanning interface: pre-configured for SEM and analytical add-ons
    • Synchronization interface: pixel, line, frame
    • Scan size: 16,384 x 16,384 pixels max.
    • Pixel dwell time: 200 ns … 6 milliseconds
    • Pixel over-sampling: 32,000x max.
    • Line averaging: 50x max.
    • Frame averaging: 256x max.
    • Synchronization: mains power
    • ROI scan: yes

    PC/Laptop, Display

    • PC/Laptop: Intel Core i3, 2x USB 2.0 minimum
    • Display: 1,280 x 1,024 resolution minimum, 2x displays recommended
    • Operating systems: Windows 10 … Windows XP
    • Network connection: recommended

    Acquisition software (DISS 5 Topography)

    • BSE detector control: complete software integration
    • SEM mag, kV information: automated SEM communication
    • SEM topography reconstruction: live automatic shape-from-shade (m2c)
    • SEM topography display: 3D visualisation, mountain view
    • SEM topography control: live rotation, pan, tilt, zoom, height-rescalling
    • SEM topography texture: solid colour, height-coded colour LUT
    • Image mixing tool: independent colour/channel, independent intensity/channel, topographic and compositional profiles
    • Scan profile templates: live display, region of interest (ROI), slow scan, area mapping, line scan, video recording (AVI)
    • Signal monitor: analogue signals profiles, level meter graphs, gradation graph tool
    • Software API: yes
    • Image caption overlay: yes
    • Default BSE image file formats: 8 and 16-bit multi-page TIFF
    • Default topography file formats: AL3D, SDF
    • Export image file formats: BMP, JPEG, PNG, GIF
    • Export topography file formats: BMP
    • Operating system: Windows 10 … Windows XP
    • Context sensitive help: English, German

    Analysis software (microCal and micro-Shape from m2c)

    • XYZ calibration: one step calibration with dedicated calibration structure
    • Data extraction: point and line profiles
    • 3D measurements: distances, angles
    • Save file formats: BCR, BCRF, AL3D, NMM, ASC
      Export file formats: PLY, TIF, BMP, JPG, PNG, GIF, TXT, DAT
    • Operating system: Windows 10 … Windows XP
    • Context sensitive help: English, German

    Parts and Cables

    • BSE sensor: optional 1x
    • BSE pre-amplifier: optional 1x
    • BSE insertion/retraction mechanism: optional 1x
    • BSE in situ cable: optional 1x
    • BSE vacuum electrical feedthrough: optional 1x
    • BSE ex situ cable: standard 1x
    • Topography calibration sample: standard 1x
    • Video processor module: standard 1x
    • Video processor ground strap: standard 1x
    • SEM mixed control & acquisition cable: standard 1x
    • SEM acquisition module: standard 1x
    • USB cables: standard 2x
    • USB memory stick: standard 1x
    • PC, keyboard, mouse: optional 1x
    • Displays: optional 2x

    Software packages

    • Video Processor USB driver: Video Processor
    • SEM acquisition USB driver: Digital Image Scanning System 5
    • Shape-from-shadow library: m2cMicroShape (m2c)
    • Acquisition software: DISS 5
    • Analysis software: microShape (m2c)
    • Calibration software: microCal (m2c)

    Weight and Dimensions

    • Video processor dimensions: 19 x 10.5 x 5 cm
    • Video processor weight: 1.1 kg
    • DISS5 module dimensions: 23.5 x 8.7 x 29.5 cm
    • DISS5 module weight: 3.4 kg
    • Shipping dimensions: typ. 36 x 32 x 56 cm
    • Shipping weight: typ. 7.5 kg

    Site requirements

    • Power: 2x mains 110/220 VAC single phase 50-60 Hz, on the same earth as the microscope
    • SEM chamber: 1x flange prepared for muti-pin vacuum electrical feedtrough to pre-amplifier
    • SEM earth: 1x ground strap
    • SEM interface: 1x external analogue interface for XY scan control and SEM signals
    • Space: video processor module must be placed in close proximity of the SEM chamber, power supply and DISS5 modules may be placed on the SEM bench

    Additional information

    test

    Backscattered (BSE) detector

    Sensor geometry: 4x quadrant diodes (monolithic sensor), or 4x rectangular diodes (hybrid sensor)
    Sensor min. energy: 1keV for detector grade Si diodes, or 5keV for standard Si diodes
    Sensor mount: retractable arm, or pole piece mount
    Sensor height: 1.2 mm
    Pre-amplifier mount: in situ
    Pre-amplifier gain: 10^7 V/A fixed
    Pre-amplifier size: 22 x 18 mm

    Video processor module

    Hardware interface: USB 2.0
    BSE signal inputs: 4x max.
    SE and AUX signal inputs: 3x max.
    Simmultaneous output signals: 4x max.
    Mixed BSE output: 1x conventional compo.
    Gain: 1 … 100x
    Output offset: 1.25V max
    Brightness and Contrast control: integrated software control
    Signal inversion: Yes
    Low-pass filter: 8-levels

    Topography calibration sample (m2c)

    GIS deposited calibration structures: 3x multi-level pyramidal, 1x spherical element
    FIB milled recognition structure: nanomarkers
    Total area: 80 x 80 μm, or 40 x 40 μm
    Nanomarker geometry: 800 nm, or 600 nm
    Pyramidal element geometry: 90 x 90 x 3 µm, or 45 x 45 x 1.8 µm
    Spherical element geometry: 10 x 10 x 1 µm
    Reference data: CD/ROM

    SEM topography acquisition module (DISS 5 Topography)

    Hardware interface: USB 2.0
    Simultaneous inputs (i.e. SE, BSE): 4x, 12-bit
    Mapping signals (i.e. EDS): 12x, 12-bit
    Scanning interface: pre-configured for SEM and analytical add-ons
    Synchronization interface: pixel, line, frame
    Scan size: 16,384 x 16,384 pixels max.
    Pixel dwell time: 200 ns … 6 milliseconds
    Pixel over-sampling: 32,000x max.
    Line averaging: 50x max.
    Frame averaging: 256x max.
    Synchronization: mains power
    ROI scan: yes

    PC/Laptop, Display

    PC/Laptop: Intel Core i3, 2x USB 2.0 minimum
    Display: 1,280 x 1,024 resolution minimum, 2x displays recommended
    Operating systems: Windows 10 … Windows XP
    Network connection: recommended

    Acquisition software (DISS 5 Topography)

    BSE detector control: complete software integration
    SEM mag, kV information: automated SEM communication
    SEM topography reconstruction: live automatic shape-from-shade (m2c)
    SEM topography display: 3D visualisation, mountain view
    SEM topography control: live rotation, pan, tilt, zoom, height-rescalling
    SEM topography texture: solid colour, height-coded colour LUT
    Image mixing tool: independent colour/channel, independent intensity/channel, topographic and compositional profiles
    Scan profile templates: live display, region of interest (ROI), slow scan, area mapping, line scan, video recording (AVI)
    Signal monitor: analogue signals profiles, level meter graphs, gradation graph tool
    Software API: yes
    Image caption overlay: yes
    Default BSE image file formats: 8 and 16-bit multi-page TIFF
    Default topography file formats: AL3D, SDF
    Export image file formats: BMP, JPEG, PNG, GIF
    Export topography file formats: BMP
    Operating system: Windows 10 … Windows XP
    Context sensitive help: English, German

    Analysis software (microCal and micro-Shape from m2c)

    XYZ calibration: one step calibration with dedicated calibration structure
    Data extraction: point and line profiles
    3D measurements: distances, angles
    Save file formats: BCR, BCRF, AL3D, NMM, ASC
    Export file formats: PLY, TIF, BMP, JPG, PNG, GIF, TXT, DAT
    Operating system: Windows 10 … Windows XP
    Context sensitive help: English, German

    Parts and Cables

    BSE sensor: optional 1x
    BSE pre-amplifier: optional 1x
    BSE insertion/retraction mechanism: optional 1x
    BSE in situ cable: optional 1x
    BSE vacuum electrical feedthrough: optional 1x
    BSE ex situ cable: standard 1x
    Topography calibration sample: standard 1x
    Video processor module: standard 1x
    Video processor ground strap: standard 1x
    SEM mixed control & acquisition cable: standard 1x
    SEM acquisition module: standard 1x
    USB cables: standard 2x
    USB memory stick: standard 1x
    PC, keyboard, mouse: optional 1x
    Displays: optional 2x

    Software packages

    Video Processor USB driver: Video Processor
    SEM acquisition USB driver: Digital Image Scanning System 5
    Shape-from-shadow library: m2cMicroShape (m2c)
    Acquisition software: DISS 5
    Analysis software: microShape (m2c)
    Calibration software: microCal (m2c)

    Weight and Dimensions

    Video processor dimensions: 19 x 10.5 x 5 cm
    Video processor weight: 1.1 kg
    DISS5 module dimensions: 23.5 x 8.7 x 29.5 cm
    DISS5 module weight: 3.4 kg
    Shipping dimensions: typ. 36 x 32 x 56 cm
    Shipping weight: typ. 7.5 kg

    Site requirements

    Power: 2x mains 110/220 VAC single phase 50-60 Hz, on the same earth as the microscope
    SEM chamber: 1x flange prepared for muti-pin vacuum electrical feedtrough to pre-amplifier
    SEM earth: 1x ground strap
    SEM interface: 1x external analogue interface for XY scan control and SEM signals
    Space: video processor module must be placed in close proximity of the SEM chamber, power supply and DISS5 modules may be placed on the SEM bench

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