Hardware
Turnkey add-on system for any SEM
- Backscattered electron detector
- Multi-channel video processor
- Scan generator and image acquisition
- Live surface topography software
Multi-segment solid-stage backscattered electron detectors
- Monolithic or hybrid quadrant sensors for high resolution
- Optional light blind sensors for high temperature/in situ SEM
- In situ pre-amplification for minimum noise and maximum speed
Video processor for simultaneous data acquisition
- Channel independent brightness and contrast controls
- Hardware mixed output for simultaneous acquisition with SE, BSE, EBIC, CL, or EDS
- USB controlled and fully integrated with the acquisition software
The most powerful and versatile SEM scanning system – DISS5
- Integrated scan generator and image acquisition
- Very large image resolution, up to 16k x 16k pixels
- Very fast scanning speed, down to 200ns dwell time
- Simultaneous 4x analogue and 12x digital counter inputs
Software
Completely integrated control and acquisition
- Live surface height reconstruction from BSE signals
- Built-in 3D surface visualisation tool
- Configurable workflows with integrated SE and BSE scan profiles
Reconstructed height is purely topographic and quantitative
- Surface normals are calculated from 4x BSE gradients at each beam position
- Complete surface topography is assembled from all surface normals
- Height resolution depends primarily on beam/sample interaction volume
Live height visualisation tool
- Pan, rotate, tilt, zoom and scale Z
- Enhance with shadows and custom colour coding
- Export to standard binary AL3D and plain text SDF formats
One step calibration software with dedicated SEM standard – m2c
- Calibration of scale in all three spatial directions
- Orthogonality of all axes (shearing)
- Analysis of nonlinear deviations
